皮秒激光作為一種新型的能量源,具有皮秒級(jí)超短脈寬、重復(fù)頻率可調(diào)、脈沖能量高等特點(diǎn),有望實(shí)現(xiàn)包括硬脆性難加工材料在內(nèi)的高精度、高效率加工效果,在材料加工領(lǐng)域逐步顯露頭角。
引 言:
隨 著大功率激光器技術(shù)的發(fā)展,激光與材料相互作用研究的深入,激光加工已經(jīng)成為加工領(lǐng)域中的一種常用技術(shù)。激光加工具有以下眾多優(yōu)勢:非接觸、后續(xù)工藝少、 加工效率高、材料耗損少等。采用超短脈沖激光加工可將能量極快地注入很小的作用區(qū)域,瞬間高能量密度沉積使電子吸收和運(yùn)動(dòng)方式發(fā)生變化,避免了激光線性吸 收、能量擴(kuò)散和轉(zhuǎn)移等影響,從根本上改變了激光與物質(zhì)相互作用機(jī)制如下圖所示
VEGA 1064nm 參數(shù)規(guī)格:
Model |
VEGA-1064 |
VEGA -532** |
Wavelength |
1064 nm |
532 nm |
Spectral width |
< 2 nm |
< 2 nm |
Pulse duration |
< 120 ps |
< 100 ps |
Pulse energy |
40 u J from single shot to 500 kHz |
20 u J from single shot to 500 kHz |
Repetition rate |
Single pulse to 1MHz(with burst mode) |
Single pulse to 1MHz(with burst mode) |
M2 |
< 1.2 |
< 1.2 |
Beam waist diameter |
1 mm |
1 mm |
Beam waist location |
At output port +-50% RR |
At output port +-50% RR |
Beam pointing |
< 25 urad/℃ |
< 25 urad/℃ |
Ellipcityt |
>0.85 |
>0.85 |
Warm-up time |
< 15 mins |
< 15 mins |
Power stability |
< 2% RMS |
< 4% RMS |
Pulse stability |
< 2% RMS |
< 4% RMS |
Polarization |
Vertical ,>100:1 |
Vertical ,>100:1 |
Pulse control |
Ext AOM with gating |
Ext AOM with gating |
Laser head dimensions (mm3) |
300 x 300 x 80 |
300 x 300 x 80 |
Laser controller dimensions |
19”/3U rack |
19”/3U rack |
Standard umbilical length |
3 m |
3 m |
Power consumption |
100 to 240 VAC <400 W |
100 to 240 VAC <400 W |
Cooling |
Air cooled |
Air cooled |
SIRIUS 皮秒激光器參數(shù)規(guī)格:
Model |
SIRIUE-1064 |
SIRIUE-532 |
Wavelength |
1064 nm |
532 nm |
Spectral width |
< 0.3 nm |
< 0.3 nm |
Pulse duration |
< 10 ps |
< 10 ps |
Pulse energy |
100 u J@20 KHz (2 W) 60 u J@50 KHz (3 W) 35 u J@100 KHz (3.5 W) 20 u J@200 KHz (4 W) 9 u J@500 KHz (4.5 W) 5 u J@1 MHz (5 W) |
50 u J@20 KHz (1 W) 30 u J@50 KHz (1.5 W) 17 u J@100 KHz (1.7 W) 10 u J@200 KHz (2 W) 4 u J@500 KHz (2.25 W) 2 u J@1 MHz (2.5 W) |
Repetition rate |
Single pulse to 1MHz(with burst mode) |
Single pulse to 1MHz(with burst mode) |
M2 |
< 1.2 |
< 1.2 |
Beam waist diameter |
1 mm |
1 mm |
Beam waist location |
At output port +-50% RR |
At output port +-50% RR |
Beam pointing |
< 25 urad/℃ |
< 25 urad/℃ |
Ellipcityt |
>0.85 |
>0.85 |
Warm-up time |
< 30 mins |
< 30 mins |
Power stability |
< 2% RMS |
< 4% RMS |
Pulse stability |
< 2% RMS |
< 4% RMS |
Polarization |
Vertical ,>100:1 |
Vertical ,>100:1 |
Pulse control |
Ext AOM with gating and burst mode |
Ext AOM with gating and burst mode |
Laser head dimensions (mm3) |
453 x 296 x 110.2 |
453 x 296 x 110.2 |
Laser controller dimensions |
19”/3U rack |
19”/3U rack |
Standard umbilical length |
3 m |
3 m |
Power consumption |
100 to 240 VAC <600 W |
100 to 240 VAC <600 W |
Cooling |
water cooled |
water cooled |
轉(zhuǎn)載請注明出處。